Products by APS Materials Inc

The semiconductor manufacturing equipment industry utilizes APS Materials, Inc.'s thermal spray coatings for dielectric layers on metal electrostatic chucks. These high-purity, dielectric coatings are very dense, highly durable, and provide long operating life, high breakdown voltage (4000+ volts),...

Shield kits, deposition rings and sputtering targets are crucial in the operation of any PVD operation. During the deposition of some refractory metals, material can build up on the walls of the chambers and shields, which then begins to flake off at a certain thickness. The results are short...

APS Materials, Inc. has done a significant amount of work applying a variety of different coatings to all sorts of semiconductor equipment components. These thermal coatings can provide corrosion resistance, erosion resistance, enhanced thermal conductivity and/or dielectric properties, depending...

APS provides refurbishment of OEM upper chambers, including removal of the original coating, machining processes to bring the DPS chamber back into specification, re-anodization of both the exterior and interior surfaces, nickel plating of the conductive top & bottom contact area, and finally...