Electrostatic Chuck ESC
Available from APS Materials Inc
The semiconductor manufacturing equipment industry utilizes APS Materials, Inc.'s thermal spray coatings for dielectric layers on metal electrostatic chucks. These high-purity, dielectric coatings are very dense, highly durable, and provide long operating life, high breakdown voltage (4000+ volts), as well as comparatively short de-chucking times. APS has served this industry with high-purity ceramic dielectric coatings for over 5 consecutive years, and our expertise in this field is unsurpassed.