Product Details

APS Materials, Inc. has done a significant amount of work applying a variety of different coatings to all sorts of semiconductor equipment components. These thermal coatings can provide corrosion resistance, erosion resistance, enhanced thermal conductivity and/or dielectric properties, depending on the application. Custom coatings are frequently engineered by APS Materials, Inc. in order to meet the specific requirements of a new or unusual application. There are also numerous cases where a plasma spray coated metal component provided a more durable, less costly alternative to a solid ceramic, quartz, carbide or nitride part.

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