GHF- High Flow Gas Recycling

Available from Tekna Plasma Systems Inc.

A gas recirculation unit considerably reduces the gas consumption of the installation. The gasleaving the filtration unit is recompressed and can be re-used as the quench gas. The system is equipped with a pressure control valve which controls the outlet pressure constant.

- Gas handling: Ar, Ar/H2, Ar/He, N2, O2
- No corrosive gases or condensable vapours.
- Dual Roots gas compressor
- Monitoring and control of outlet pressure constant
- H2 monitoring

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