GHF- High Flow Gas Recycling
Available from Tekna Plasma Systems Inc.
A gas recirculation unit considerably reduces the gas consumption of the installation. The gasleaving the filtration unit is recompressed and can be re-used as the quench gas. The system is equipped with a pressure control valve which controls the outlet pressure constant.
- Gas handling: Ar, Ar/H2, Ar/He, N2, O2
- No corrosive gases or condensable vapours.
- Dual Roots gas compressor
- Monitoring and control of outlet pressure constant
- H2 monitoring